Hi, I've not experience with this configuration. However I 'd like to prepare such cantilever with a piezoelectric layer and electrodes to measure the d31. According to me, you should have a look on refs // E Cattan et al, Sensors and Actuators 74 (1999) 60 and // B Jaber et al, Sensors and Actuators A 63 (1997) 91, were a measurment of e31 with a cantilever is described. Best regards, Vincent Mortet -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of Priyanka Aggarwal Sent: donderdag 24 oktober 2002 19:12 To: mems-talk@memsnet.org Subject: Re: [mems-talk] Piezoelectricity Measurement Hi, I am also working on the same lines. I was wondering where should I have the metal contacts,I want to have them on the fixed end of the cantilever , but I am not sure how to make metal contacts till that surface. CAn you suggest something.I am attching a document to make it clearer. Thanks Priyanka ----- Original Message ----- From: "Vincent Mortet"To: Sent: Thursday, October 24, 2002 2:59 AM Subject: RE: [mems-talk] Piezoelectricity Measurement > Hello, > > 1/To measure the reverse piezoelectric coeffience d33 of "a layer" you have > to make a sandwich of it, between two elctectods on a thick substrate (2mm) > you can apply a AC voltage (frequency f0) to the layer and you measure the > displasment of the top surface with a calibrated AFM or interferometer. For > the AFM method, you have to use the A-B signal from the photodetector with > the frequency f0, ie filtered with an lock-in amplifier. > > 2/It exists a methode to measure the direct piezoelectric coefficient e31 > on which you collect the charges created by the piezo on the electrode > during the vibration on a cantilever covered with the piezoelectric > material. > > Here are some refs to help you on points 1/ A-L Kholin et al. Rev Sci > Instrum Vol 67 No 5 May 1996 1935 > M-A Dubois et al, Appl Phys Lett, Vol 89, No 11 (2001) 6389 > C-M Lueng et al J Appl Phys, Vol 88, No 9 (2000) 5360 > J-A Christman et al App Phys Lett, Vol73, No 26 (1998) 3851 > > 2/ E Cattan et al, Sensors and Actuators 74 (1999) 60 > B Jaber et al, Sensors and Actuators A 63 (1997) 91 > J-F Shepard Jr et al, Sensors and Actuators A 71 (1998) 133 > > Best regards, > Vincent Mortet > > -----Original Message----- > From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On > Behalf Of Xiaoqin Huang > Sent: woensdag 23 oktober 2002 19:56 > To: mems-talk@memsnet.org > Subject: [mems-talk] Piezoelectricity Measurement > > > Hi all, > > I am planning to measure the piezoelectricity of ZnO, but I just know a > bit about this kind of measurement. If you are familiar with this > measurement, please give me some suggestions. Thank you very much. > > Jenny X. Huang > > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://www.memsnet.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://www.memsnet.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ >