Hi, I need some help, regarding fabrication of ZnO/AlN layer on the surface of a metal electrode which is in contact with silicon substrate. I need to deposit aluminum nitride on silicon wafer or silicon oxide, which ever has better adhesion properties with AlN/ZnO. Before depositng AlN/ZnO on silicon wafer, i need a layer of compatible metal with it and to pattern it accordingly. Can you suggest something, like the condition of sputtering, type of chemicals that can be used to etch AlN /ZnOafter patterning etc I will be very grateful for your help. Thanks Priyanka ______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://www.memsnet.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/ _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://www.memsnet.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/