durusmail: mems-talk: Ti etchant
Ti etchant
2004-02-27
2004-02-29
2004-03-01
2004-03-01
2004-03-01
Ti etchant
SLU
2004-02-27
Hello, everybody,

We're going to etch 500nm and 1um thick Ti film. It takes some time to buy
the pre-mixed etchant, so we are looking for some alternative acid etchant
that may be available in our lab, such as nitrid acid, or sulfric acid.
We'd
appreciate if  anybody can share such recipe with us.

lu



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