durusmail: mems-talk: About Negative Photoresist
About Negative Photoresist
2005-05-09
2005-05-09
2005-05-11
About Negative Photoresist
anttipe@cc.hut.fi
2005-05-08
Hi,

I'm looking for negative photo resist for 5 to 30 um processing. In this
process the resolution is not important. The resist and developer should (if
possible) be nontoxic. It would nice to have resist stripped in Ace or in some
AZ developer. I know Japanese have resist called NFR015, but they
doesn't seem to sell it to Europeans. I wonder what you might know about PR's
or PR vendors?

With Best Regards,
Antti Peltonen
Process Engineer
Helsinki University of Technology
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