Chad You are right, of course. My apologies if the previous message caused confusion. Kristjan Leosson Lumiscence A/S Quoting Brubaker Chad: > I'm not sure if that is correct. Negative tone resists work by becoming > cross-linked (i.e., less soluble) when exposed to UV. So, the flood > exposure process you described would just be re-exposing the regions > that were already exposed the first time around (since the pattern is > there due to the fact that it was exposed in the first round).