Dear all, I used S1813 as the mask for the DRIE of the top layer from the front-side. Then I put the chip upside down, attached it to an Oxide wafer and did another DRIE of the substrate from the back-side . After the etch, I found it difficult to remove the polymer formed during the etch. I dip my chips in Aceton for 10 mins and then used Oxygen plasmer to clean it. However, the top layer(device layer) of my chips were still not clean enough. Could anybody give me some suggestions on how to completely clean the chips after these two DRIE process? Thanks very much. -- Da-xiang Zhou PhD candidate Semiconductor Physics Group Cavendish Laboratory University of Cambridge