Try Oxygen plasma. Bill Moffat ________________________________ From: mems-talk-bounces@memsnet.org on behalf of Jesse D Fowler Sent: Tue 3/18/2008 8:20 AM To: vikrant.c@iitb.ac.in; General MEMS discussion Subject: Re: [mems-talk] removing sticky adhesive I would try acetone/alcohol/water. If that doesn't work, piranha. "Vikrant A. Chaudhari :)"writes: hello, is there a way to remove sticky adhesive, which is left over after a cellotape is removed. we are using cello tape for masking while etching SiN, and when cellotape is peeled of the sticky glue is left over. Is there a better way to remove it with out scrubbing?