We have removed sticky tape residue with a gentle Oxygen plasma.  Bill =
Moffat

________________________________

From: mems-talk-bounces@memsnet.org on behalf of Vikrant A. Chaudhari :)
Sent: Tue 3/18/2008 7:03 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] removing sticky adhesive

hello,

is there a way to remove sticky adhesive, which is left over after a
cellotape is removed. we are using cello tape for masking while etching
SiN, and when cellotape is peeled of the sticky glue is left over. Is =
there a better way to remove it with out scrubbing?