Oxygen plasma is 100% successful in removing sticky tape residue.
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________________________________

From: mems-talk-bounces@memsnet.org on behalf of Olgierd Cybulski
Sent: Wed 3/19/2008 10:57 AM
To: vikrant.c@iitb.ac.in; General MEMS discussion
Subject: Re: [mems-talk] removing sticky adhesive

>  is there a way to remove sticky adhesive, which is left over after a
>  cellotape is removed. we are using cello tape for masking while =
etching
>  SiN, and when cellotape is peeled of the sticky glue is left over. Is =
there
>  a better way to remove it with out scrubbing?