O2 plasma removes the sticky glues of cellotapes. Regards, Kagan TOPALLI, Ph. D. Senior Research Engineer MEMS-VLSI and EMT Group Middle East Technical University Dept. of Electrical & Electronics Eng. TR-06531 Ankara Turkey Phone: +90 312 210 44 09 or +90 312 210 23 40 Fax: +90 312 210 23 04 http://www.mems.eee.metu.edu.tr/~topalli/ -- Olgierd Cybulski wrote: >> is there a way to remove sticky adhesive, which is left over after a >> cellotape is removed. we are using cello tape for masking while etching >> SiN, and when cellotape is peeled of the sticky glue is left over. Is there >> a better way to remove it with out scrubbing? >> > > It depends on the type of glue. Try IPA, extraction naphtha or benzine. > Sometimes acetone is enough.