durusmail: mems-talk: PR removal after ICP RIE etching
PR removal after ICP RIE etching
2008-05-20
2008-05-20
2008-05-20
2008-05-20
2008-05-20
2008-05-20
2008-05-21
2008-05-23
2008-05-23
PR removal after ICP RIE etching
Andrew Sarangan
2008-05-20
What type of photoresist?

On Mon, May 19, 2008 at 11:00 PM, Satish Yeldandi
 wrote:
> Hi!
>
> I have problem removing photo resist after using it as mask for
> ICP-RIE etching. I tried Acetone, Acetone+Sonication, PR stripper,
> Asher. Nothing is working. Did anyone face this problem before.
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