There should not be - 20nm of SiO2 isn't much more than native oxide anyway. Best Regards, Chad Brubaker EV Group invent * innovate * implement Senior Process Technology Engineer - Direct: +1 (480) 305 2414, Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401 Cell: +1 (602) 321 6071 E-Mail: C.Brubaker@EVGroup.com, Web: www.EVGroup.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of li shifeng Sent: Thursday, September 18, 2008 11:32 AM To: mems-talk@memsnet.org Subject: [mems-talk] glass and coated thin film silicon anodic wafer bonding Hi, colleagues, I want to bond glass and silicon wafer using anodic bonding. The silicon wafer is coated with 20nm SiO2/20nm a-Si/20nm SiO2 stack film. The glass wafer is etched channels with 100nm width and 50 nm depth. I am wondering if there are any problems to bond them.