Hi, Isn't native oxide something about 12A (1.2 nm) thick?? Peter Kuijpers mailto:p.e.m.kuijpers@philips.com ________________________________________ Van: mems-talk-bounces@memsnet.org namens Brubaker Chad [C.Brubaker@EVGroup.com] Verzonden: vrijdag 19 september 2008 2:52 Aan: General MEMS discussion CC: Brubaker Chad Onderwerp: Re: [mems-talk] glass and coated thin film silicon anodicwafer bonding There should not be - 20nm of SiO2 isn't much more than native oxide anyway. Best Regards, Chad Brubaker