durusmail: mems-talk: glass and coated thin film silicon anodic wafer bonding
glass and coated thin film silicon anodic wafer bonding
2008-09-19
2008-09-19
2008-09-19
2008-10-02
2008-09-18
glass and coated thin film silicon anodic wafer bonding
shay kaplan
2008-09-19
Depends on what is the xtal direction and the environment -  usually more
towards 40-60A

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Kuijpers, P e m
Sent: Friday, September 19, 2008 8:36 AM
To: General MEMS discussion
Cc: Brubaker Chad
Subject: Re: [mems-talk] glass and coated thin film silicon anodic wafer
bonding

Hi,

Isn't native oxide something about 12A (1.2 nm) thick??

Peter Kuijpers
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