Silayte means to treat with a silicon containing vapor which reacts with the polymer silayting it. Thus the polymer will have silicon in it, or at least at the surface. Ed -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of basar bolukbas Sent: Friday, January 30, 2009 12:11 AM To: mems litho Subject: Re: [mems-talk] Double lithography problem with SU1828-TI35ES Hello Bill, Thank you very much for your answer. What you mean you said ''Silylate''. How can i set to Silicon barrier? Do you you mean SiN deposition? If so i can deposite with PECVD-Sputtering. Best Regards.