Hello Edward.

Which kind of plasma treatments are suitable for SU1828?
Or is it not changeable resist by resist?
I use SU1828 for first lithography and TI35 for second.
I think i will treat SU1828 but i am not sure for the ambient.
I can apply O2 plasma, CHF3, SF6, CCl2 with RIE also.

Which one is suitable do you think?

Thank you for your help.

Best Regards.