Hello Bill,

First of all, please forgive me beacuse i am a rookie for this kind of
''advanced process''.
And, i am appriciate for your great helpings. But i unfortunately, i have still
questions to you.
Do you suggest that i should coat HMDS on top of first resist before second
lithography?
After HMDS what should i do? Do i have to make O2 plasma or just HMDS spin
coating is enough for me in order to make another lithography?

Again thank you for your help.

Best Regards.