durusmail: mems-talk: Silicon_Glass Fusion Bonding
Silicon_Glass Fusion Bonding
2009-02-10
2009-02-10
2009-02-10
2009-02-10
2009-02-10
2009-02-10
2009-02-10
2009-02-11
2009-02-11
2009-02-12
2009-02-12
2009-02-12
2009-02-12
2009-02-13
2009-02-13
2009-02-13
2009-02-13
Silicon_Glass Fusion Bonding
Xiaoguang Liu
2009-02-10
Hi Bill
Could you elaborate on the plasma bonding process?
Thanks,
Leo

On Tue, Feb 10, 2009 at 3:00 PM, Bill Moffat
 wrote:
> Do you have plasma equipment?  Plasma bonding is possible.  Bill Moffat
>

Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79@purdue.edu
reply