Are you ramping the temperature down to avoid thermal shocking the bonded pair? -----Original Message----- From: jingru zhang [mailto:ruharvard@gmail.com] Sent: Thursday, February 26, 2009 11:12 AM To: mems-talk@memsnet.org Subject: [mems-talk] glass cracking during anodic bonding Dear all, I have deep channels (around a hundred microns) on the silicon substrate. and during the anodic bonding of silicon and glass, they bonded well but the glass cracked. Maybe it is the stress around the channels walls which caused cracking. The voltage I am using now is 500 w, and the temperature goes to 400 deg c. Does anyone have similar experience? How to avoid this? Thank you very much. Best Regards, Jingru