durusmail: mems-talk: metallization on PDMS
metallization on PDMS
metallization on PDMS
Barbara Cortese
2009-06-03
it's not the thickness of the pdms you have to reduce but the thickness of your
sputtering layer. How much chrome and gold are you sputtering?

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> Hi,
>
> Barbara, thanks for your reply.  I tried reducing the thickness of PDMS
> to around 200-300 microns by spin coating it onto a glass wafer. After
> curing and plasma oxidation I tried sputter of Chrome and Gold. But it
> still showed the same cracked layer. Can you or someone else please
> suggest as to what I should be doing to avoid these cracked metal
> films.
>
> warm regards,
> Nidhi
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