Dear Friends, I had some questions related to PhotoResist ashing using DRIE chamber. We have STS ASE DRIE. 1. If metal pads are beneath PhotoResist and metal gets exposed for one or two minutes to Oxygen plasma, what can be the side effects. STS has strictly told that metal should not be exposed in Chamber to avoid micro masking related issues/ chamber contamination. I will like to know if any body is using DRIE chamber for photoresist ashing, and if so, have they faced any problems related to chamber contamination. Metals likely to get exposed are: Aluminium , Gold Waiting for the reply, -- Ashwini