Dear Ashwini, I have previously etched some silicon wafer using DRIE in a STS tool with some metal exposed just at the end of the etching, perhaps about 1 min. I always performed a cleaning just after this step (O2 plasma and sometimes manually) and we have never reported any difference. I have also seen people using aluminium as a hard mask for DRIE ... Regards, Alex ashwini jambhalikar a écrit : > Dear Friends, > > I had some questions related to PhotoResist ashing using DRIE chamber. > > We have STS ASE DRIE. > > 1. If metal pads are beneath PhotoResist and metal gets exposed for > one or two minutes to Oxygen plasma, what can be the side effects. > > STS has strictly told that metal should not be exposed in Chamber to > avoid micro masking related issues/ chamber contamination. > > > I will like to know if any body is using DRIE chamber for photoresist > ashing, and if so, have they faced any problems related to chamber > contamination. > > Metals likely to get exposed are: Aluminium , Gold -- Dr. Alexandre BOE Post-doctoral researcher Université Catholique de Louvain FSA/ELEC/EMIC - Laboratoire d'hyperfréquences Bâtiment Maxwell b.207 Place du Levant, 3 B-1348 Louvain-la-Neuve Belgium alexandre.boe@uclouvain.be Tel. +32 10 478 106 Fax +32 10 478 705