I've been using Al as DRIE etching mask for a while. So far we've not run into any problem. O2 plasma with a reasonable intensity would not do anything to the metal. Just watch out and avoid high bias to prevent ion milling. Jie On Mon, Jul 6, 2009 at 12:03 AM, ashwini jambhalikarwrote: > Dear Friends, > > I had some questions related to PhotoResist ashing using DRIE chamber. > > We have STS ASE DRIE. > > 1. If metal pads are beneath PhotoResist and metal gets exposed for > one or two minutes to Oxygen plasma, what can be the side effects. > > STS has strictly told that metal should not be exposed in Chamber to > avoid micro masking related issues/ chamber contamination. > > > I will like to know if any body is using DRIE chamber for photoresist > ashing, and if so, have they faced any problems related to chamber > contamination. > > Metals likely to get exposed are: Aluminium , Gold * Zou Jie (Jay) * Department of Physics * University of Florida * Tel: +1-352-846-8018 * Email: zoujiepku@gmail.com * Homepage: http://plaza.ufl.edu/zoujie/