Apply resist statically and start by spreading the resist at low rpms (300 - 500). Once wafer has been covered slowly increase to the desired speed and time to obtain your thickness. Phil > From: forum@exchange.uta.edu > To: mems-talk@memsnet.org > Date: Tue, 21 Jul 2009 16:19:05 -0500 > Subject: [mems-talk] SPR 220-7 > > Hi everyone, > > I am using SPR 220-7 photoresist and am looking at 7 micron thickness. I am spinning at >3500 rpm for 30 seconds and also tried 3k rpm for 30 seconds.. > > I see a lot of streaks on the wafer and not getting a uniform coating. I did take a look at > Stanford nanofab website (www.snf.edu) but the problem is that I have manual spinners > and their manual procedure is also not working fine for me. > > If anyone has worked with it before, your suggestions would be invaluable. > > Thanks in advance. > Forum