Forum, I use SPR 220-7 and get a good coat with the following: Step 1 2 Dispense on Vel rpm 200 4000 Ramp r/s 15 2000 Time sec 14 30 You need to almost cover the wafer with resist at low RPM, then ramp to your final RPM. Don't forget to check your cup exhaust. If high or low you will get a bad coat. Ad StarCryoelectronics 505-424-6454 ahall@starcryo.com -----Original Message----- From: Shah, Forum N [mailto:forum@exchange.uta.edu] Sent: Tuesday, July 21, 2009 2:19 PM To: General MEMS discussion Subject: [mems-talk] SPR 220-7 Hi everyone, I am using SPR 220-7 photoresist and am looking at 7 micron thickness. I am spinning at 3500 rpm for 30 seconds and also tried 3k rpm for 30 seconds. I see a lot of streaks on the wafer and not getting a uniform coating. I did take a look at Stanford nanofab website (www.snf.edu) but the problem is that I have manual spinners and their manual procedure is also not working fine for me. If anyone has worked with it before, your suggestions would be invaluable. Thanks in advance. Forum