Hi Vijay, I have etched >100µm of Si with Bosch DRIE simply using AZ4562 resist as a mask. I believe the selectivity was about 1:65 (I used 6µm resist which was more than enough to etch 150µm deep). The feature definition is not as good as with SiO2 mask but you can always try a thinner resist layer. Hope that helps, Tim -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Vijay Rajaraman - EWI Sent: 13 October 2009 15:25 To: mems-talk@memsnet.org Subject: [mems-talk] Masking Material for DRIE Hi All, I want to etch 100 microns of Si using Bosch DRIE and I'm unable to use some well known masking materials such as SiO2/ Al/Al2O3 for specific reasons. So has anyone tried some other masking material than the above with reasonable selectivity? For instance, I could think of a spin-on material such as resist or SOG ? Please share your experiences, either in the forum or in person (by e-mail). Any tip(s)/suggestion(s) are appreciated. Thanks, Vijay