Hello Marco,

You may try to contact some of the smaller mask manufacturers - that is
exactly what they are doing, making patterns into chrome on glass. The issue
may be that they usually deal with standardized mask blanks, while your
slide may be different. Therefore smaller supplier may be more flexible.

Depending on the dimensions of the holes you are making, you may use also
contact lithography and etching to generate required holes.

The thickness you specified is far too thick for the requirement to block
visible light - standard lithography masks are in range of 100 nm and though
non transparent to UV light.

If you will have problems finding the vendor in your area, contact me
directly.

Best regards,

Daniel Figura

smartfabgroup
process consulting - data processing - fab software
Phone: +44 20 3286 4342
E-mail: daniel.figura@smartfabgroup.com, Web: www.smartfabgroup.com

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Marc Reinig
Sent: Monday, February 08, 2010 11:19 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] patterning sub-micron holes in chromium

I would like to place one to several sub-micron holes in a film of chromium
on a glass slide.  The chromium does not have to be very thick, only enough
to block visible light, a few microns thick I think.

Anyone have a recommendation on methods or any services that can provide
this?

Thanks in advance,

Marco