Hi everyone,

After I did DRIE etching on silicon samples, I observed grass existing
in trenches.

I use Al as hard mask. Is there any way I can get
grasses away from these samples?

Thanks,


Li. Zhang
---------
Graduate Student
Edward P. Fitts Department of Industrial and Systems Engineering
North Carolina State University
Raleigh, NC 27695-7906
USA
TEL: (919) 413-5459
Email: lzhang13@ncsu.edu
Web:  http://www.ise.ncsu.edu
         http://www.nnf.ncsu.edu