Hi Li. Zhang

       How thick your Al and what depth you etched down to the silicon also
needs hints on the recipe

--- On Sat, 20/2/10, Li. Zhang  wrote:

From: Li. Zhang 
Subject: [mems-talk] DRIE Grass Cleaning
To: "mems-talk@memsnet.org" 
Date: Saturday, 20 February, 2010, 3:45 AM

Hi everyone,

After I did DRIE etching on silicon samples, I observed grass existing
in trenches.

I use Al as hard mask. Is there any way I can get
grasses away from these samples?

Thanks,

Li. Zhang