Hi Li. Zhang
                         I did a HF mode DRIE for 10 minutes with that recipe.
and I could achieve 38.8um depth. from this the approximate rate is
3.88um/minute. For HF mode ARDE is higher. hope this will help you

best regard
Renil

--- On Tue, 23/2/10, Li. Zhang  wrote:

From: Li. Zhang 
Subject: Re: [mems-talk] DRIE Grass Cleaning
To: mems-talk@memsnet.org
Date: Tuesday, 23 February, 2010, 9:53 AM

Hi Renil,

Thanks for sharing your recipe. Would you please let me know what is the
etching rate for this recipe?

The etching rate of my recipe is set to be around 1um/min. I have not check
the actual rate yet, but I guess it would be a little bit higher than
expected.

I tried to do ultrasonic cleaning in DI water. This helps to clean the long
and large grass, but has nothing to do with small grasses.

Best,
Li