Hi Renil,

Thanks for sharing your recipe. Would you please let me know what is the
etching rate for this recipe?

The etching rate of my recipe is set to be around 1um/min. I have not check
the actual rate yet, but I guess it would be a little bit higher than
expected.

I tried to do ultrasonic cleaning in DI water. This helps to clean the long
and large grass, but has nothing to do with small grasses.

Best,
Li