Hi Sangeeth,

Unfortunately, I do not have thermal evaporator with me. I do not think we can
do it with sputtering, since it is conformal deposition.

Regards,

Lando

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Hi Lando,

I am just wondering how can you do it with e beam evaporation. electron beam
beam can still react with PMMA and it can harden the polymer(PMMA acts as
negative tone resist under high dose)

It works well for me both RF sputtering and Thermal evaporation.

thanks,
sangeeth