Dear Lando, Make sure that your step 2 doesn't remove too much of the PMMA. Maybe you can measure the thickness of the PMMA with a surface profiler. If the remaining layer of PMMA gets thinner, the lift-off gets more difficult. I guess you already do the Ti deposition by e-beam evaporation. Sputtering would also cover the PMMA sidewalls. For me, I always need ultrasonic agitation (5 min in Acetone + 5 min in IPA) to do the lift-off. Only soaking in acetone will not lift-off the metal. Regards, --Christoph -----Original Message----- From: landobasa [mailto:landobasa@yahoo.com] Sent: Tuesday, June 01, 2010 11:09 PM To: mems-talk@memsnet.org Subject: [mems-talk] PMMA cracking during e beam evaporation Dear Researcher, I am still a beginner in fabrication, and I have these following problems in the lift-off process. In order to provide the context, let me briefly write the process steps: 1) PMMA film (200nm thickness) is patterned using Electron Beam Lithography (developed for 60s and IPA for 30s). 2) Patterned PMMA film was subjected to UV Ozone Stripper (SAMCO UV-1) for 60s. 3) The sample was deposited by Ti with 20nm thickness (with the rate of 0.06nm/s) 4) The sample was soaked in Acetone. Problems: 1) There are cracks everywhere in PMMA film after E-Beam Evaporation. 2) The PMMA cannot be removed by acetone. Any help would be very much appreciated. Best Regards, Lando