durusmail: mems-talk: Ni adhesion to Si
Ni adhesion to Si
Ni adhesion to Si
Xiaohui Lin
2010-09-15
You may also try Ti/Ni combanation. It works fine for me.

2010/9/15 Denis Petrov 

> Hi!
>
> Ni has bad adhesion to Cr but good to gold. So, you could try to
> sputter first say 15 nm of Cr followed by 80 nm of Gold. And then your
> Ni.
>
> Regards,
>
> Denis

--
Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: xiaohui.lin@mail.utexas.edu
Office: (512) 471-4349
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