You may also try Ti/Ni combanation. It works fine for me. 2010/9/15 Denis Petrov> Hi! > > Ni has bad adhesion to Cr but good to gold. So, you could try to > sputter first say 15 nm of Cr followed by 80 nm of Gold. And then your > Ni. > > Regards, > > Denis -- Lin, Xiaohui Ph.D. Program in Electrical and Computer Engineering Nanophotonics and Optical Interconnects Group Microelectronics Research Center The University of Texas at Austin E-mail: xiaohui.lin@mail.utexas.edu Office: (512) 471-4349