Salam, I think you should be forming Ni silicide at the annealing temperatures you state and the Ni should stick well. There may be a problem with the some contaminant at the Ni/Si interface. In some sputter tools you can backsputter with Ar to clean the Si surface, or you may need to do an O2 plasma descum and/or HF clean first. Pat -----Original Message----- From: mems-talk-bounces+gwatson=princeton.edu@memsnet.org [mailto:mems-talk- bounces+gwatson=princeton.edu@memsnet.org] On Behalf Of Denis Petrov Sent: Wednesday, September 15, 2010 8:55 AM To: General MEMS discussion Subject: Re: [mems-talk] Ni adhesion to Si Hi! Ni has bad adhesion to Cr but good to gold. So, you could try to sputter first say 15 nm of Cr followed by 80 nm of Gold. And then your Ni. Regards, Denis