If you deposited Au on glass and Ti on top of the Au, the problem is that Au does not adhere to glass very well. You will need to use some Ti under the Au. If you deposited the Ti on the glass and Au on top, then the problem is most likely related to glass surface preparation. What cleaning did you perform before the deposition? Also, what are the thicknesses of the films in question? Dan Ruiz ________________________________ From: mems-talk-bounces+dan.ruiz=3Dhoneywell.com@memsnet.org on behalf = of Binh Tran Sent: Thu 12/2/10 8:06 PM To: MemsTalk Subject: [mems-talk] Au/Ti adhesion problem Hi all I'm having a problem with the Au/Ti adhesion on glass wafer as follow : I had finished the Au/Ti coating process on the glass wafer (piranha treated), there is no problem. Then I used some of them for my experiment at that time (the adhesion was good) and kept the others for the later use. After a few days when I used the others and there was a problem with the Au/Ti layer. They became sensitive and easily peel off even when washing with DI water. I don't know why there is a different adhesion between the first and the second time using. Does anyone face this problem before ? Thank you Binh Tran MS Candidate - Nano System Kyungwon University - Korea