Hey Binh, another vote for Cr adhesion layer. Or you could try W-10Ti, if you have such a target (works great as Au adhesion layer). By the way, what is the thickness of this gold layer? cheers m On 12/3/10, Andrew Saranganwrote: > A thin layer of Cr helps the adhesion of Au. However, your peeling > issue could be due to a number of other causes. How were these films > produced - evaporation, magnetron, sputtering.. Mag sputtering under > low pressure can lead to excessive compressive stress which can cause > buckling delaminations. Evaporated films can have tensile stress and > lead to void defects. Stresses can also develop due to absorption of > moisture in evaporated films. You should be able to determine if the > stress is compressive or tensile by examining the peeling regions.