The fastest solvent I have used is Trichloroethlyene. An alternative is National Diagnostic's OptiClear-W > >> From: omsuwal@gmail.com >> Date: Wed, 8 Dec 2010 11:07:45 +0900 >> To: mems-talk@memsnet.org >> Subject: [mems-talk] How to strip off Apiezon (Black) wax? >> >> Hi friends, >> >> I wonder whether some of you have used apiezon (black) wax on Si wafers. I >> applied on a silicon surface to protect the surface while wet etching. I am >> trying to remove the wax in easy method. I would be glad if someone knows >> the easy and clean room friendly method to remove the wax from Si surface.. I >> have tried the following methods: >> >> 1. Boiling acetone / Methanol / IPA - It takes very long time and cannot >> remove well. >> >> 2. Piranha solution - It removes well but produces lot of unpleasant fumes >> and contaminates the labwares. It is no problem if wax is little amount. ( >> but I applied on a whole 4 inch wafer) >> >> 3. TCE ( I hate to use TCE). >> >> Any other methods are acknowledged. >> >> Thank you >> >> Om