You might have luck with hot N--Methyl-2-pyrrolidone aka NMP at 60 deg
C.

>>> Om Suwal  12/7/2010 9:07 PM >>>
Hi friends,

I wonder whether some of you have used apiezon (black) wax on Si
wafers. I
applied on a silicon surface to protect the surface while wet etching.
I am
trying to remove the wax in easy method. I would be glad if someone
knows
the easy and clean room friendly method to remove the wax from Si
surface. I
have tried the following methods:

1. Boiling acetone / Methanol / IPA - It takes very long time and
cannot
remove well.

2. Piranha solution - It removes well but produces lot of unpleasant
fumes
and contaminates the labwares. It is no problem if wax is little
amount. (
but I applied on a whole 4 inch wafer)

3. TCE ( I hate to use TCE).

Any other methods are acknowledged.

Thank you

Om