Use Triagen from Ecolink, its less toxic than TCE and works pretty well on
apiezon wax

Hung-I Kuo

On Tue, Dec 7, 2010 at 9:07 PM, Om Suwal  wrote:

> Hi friends,
>
> I wonder whether some of you have used apiezon (black) wax on Si wafers. I
> applied on a silicon surface to protect the surface while wet etching. I am
> trying to remove the wax in easy method. I would be glad if someone knows
> the easy and clean room friendly method to remove the wax from Si surface.
> I
> have tried the following methods:
>
> 1. Boiling acetone / Methanol / IPA - It takes very long time and cannot
> remove well.
>
> 2. Piranha solution - It removes well but produces lot of unpleasant fumes
> and contaminates the labwares. It is no problem if wax is little amount. (
> but I applied on a whole 4 inch wafer)
>
> 3. TCE ( I hate to use TCE).
>
> Any other methods are acknowledged.
>
> Thank you
>
> Om