Debashis, The compact disc manufacturers have a similar problem they solve with a combination plasma cleaner/ silane chemistry reactor for cleaning and modification of the surface to any desired contact angle for stiction or sliction. Get to me for complete details. bmoffat@yieldengineering.com. -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of DEBASHIS MAJI Sent: Tuesday, December 14, 2010 9:08 AM To: General MEMS discussion Subject: Re: [mems-talk] PDMS fine structures Dear All, Thanks for your comments and suggestions. Actually I dont have either silane or the teflon coating with me. I'll try to get them and see. Meanwhile I shall try to reduce the baking temp of PDMS and check out... Do you all suggest to clean up the Su8 master after each moulding process with some chemicals or ultrasonication? Please advise. Thanks in advance. Debashis Maji