durusmail: mems-talk: PDMS fine structures
PDMS fine structures
2010-12-12
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2010-12-22
PDMS fine structures
Tsoll Doiiu
2010-12-15
I'm gonna suggest that you did not allow PDMS to cool down completely, and use
too high curing temperature for a long time. Usually I use 80C for 20-25 min in
an oven, and than put the sample on a surface with a temperature below room T
for like a 10 min - after that I do not have any tearing of PR
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