Dear Mr. Chiappini,

the process you want to do on the MA6 may be possible with special software. If
you contact me directly via email we can discuss that in detail.

Best regards,

Dr. Marc Hennemeyer
Application Scientist

SÜSS MicroTec Lithography
e-Mail:  marc.hennemeyer@suss.com

60 Years of Engineering Spirit - SUSS MicroTec

www.suss.com/innovative_minds

Registergericht München,  HRB 140542;  Geschäftsführung: Rolf Wolf


> -----Original Message-----
> From: mems-talk-bounces+marc.hennemeyer=suss.com@memsnet.org
> [mailto:mems-talk-bounces+marc.hennemeyer=suss.com@memsnet.org
> ] On Behalf Of Gareth Jenkins
> Sent: Thursday, February 17, 2011 4:45 PM
> To: General MEMS discussion
> Subject: Re: [mems-talk] K. SUSS MA6 Double exposure
>
> If you ran a multiple exposure, maybe you can shift it
> between exposures.
> I have a feeling the mask might separate in-between but if
> not, maybe you can risk moving 5 microns in contact?
>
> On Wed, Feb 16, 2011 at 23:43, Ciro Chiappini
> wrote:
>
> > Hello
> >
> > I need to run a double exposure in vacuum contact mode with
> a K. Suss
> > MA6 tool. The two exposures must be shifted by roughly 5
> microns, but
> > I don't have a way to visually align them.
> >
> > The process I was going to run was: load, WEC, bring wafer
> to contact,
> > expose, bring back to alignment separation, slide 5um on the
> > micromanipulator, bring to contact, expose, unload.
> >
> > If I run the standard exposure sequence, after the first
> exposure the
> > tool requires to unload the wafer (and thus I'll lose my rough
> > alignment)
> >
> > The easiest way I see to accomplish this is to use the
> light intensity
> > check button on the tool, that allows to operate the UV light
> > independently. Unfortunately that button is not functional while a
> > substrate is present.
> >
> > Has anyone ever been able to override the standard exposure
> sequence
> > on an MA6?
> >
> > I Have easily run this protocol on an EVG620 with the low level IO,
> > but I need to expose 600nm features and our EVG620 cannot resolve
> > them.
> >
> > Thanks for your help.