IPA won't do much. Did you try toluene or maybe sulphuric acid?
..

On Wed, Mar 9, 2011 at 15:18, righeira carnegie wrote:

> I am having problems cleaning this Hard mask, That is to remove the extra
> PDMS that is stuck to the hard mask. We tried O2 plasma, IPA with and
> without ultrasonicating. Nothing is helping that poor PDMS to detach from
> the silicon hard mask. How do you guys do it?
>
> Another problem is making the PDMS mold for the NIL process. When made
> there
> is a formation of clarity diorder it looked like a fogged glass. what do
> you
> guys think this is? help needed.
>
> Thanks for replying,
>
> sung mung,
> International Scholar,
> IMEC
> Belgium.