For something a bit gentler, use a release layer such as omnicoat
under the SU-8, and release in a weaker base (any of the positive
resist developers you have will be fine).

- Kevin

On Fri, Apr 15, 2011 at 1:01 AM, Aarthi lavanya  wrote:
> Hi,
>
> I have structures sitting on Si wafer and it is covered with layer of Su-8.
> The main idea is to etch away Si and have a Su-8 layer with structures on
> it.
>
> I've been trying to etch Si using KOH and always end up with gooey looking
> liquid and the Si looking all messed.
>
> Suggestions please ..
>
> Cheers
> Aarthi