I was able to create free standing SU-8 structures using a silicon substrate by spinning OmniCoat on the wafer first. During the develop the SU-8 released from the substrate. Jonathan Abbott > > 1. Si Etch with KOH (Aarthi lavanya) > Hi, > > I have structures sitting on Si wafer and it is covered with layer of Su-8. The main idea is to etch away Si and have a Su-8 layer with structures on it. > > I've been trying to etch Si using KOH and always end up with gooey looking liquid and the Si looking all messed. > > Suggestions please .. > > Cheers > Aarthi