Any reason you can't metalize the SU-8 directly?

- Kevin

On Sun, Apr 17, 2011 at 9:31 PM, Aarthi lavanya  wrote:
> Thanks for the suggestions. I think I have not made myself quite clear.
> I am not releasing Su-8 structures, I am transferring the metal structures
> on Si to Su-8.( For example I have wires made of Cr/ Ag or Cr/ Au sitting on
> Si wafer. Then i have an layer of Su-8 on top of the structures. So the
> metal structures are sandwiched between Su-8 on one end and Si on the other,
> the idea is to have the wires transferred on Su-8 layer).  I had tried
> different methods for releasing the structures,like having a Ti or Cr layer
> covering the entire wafer and then try to etch away Cr or Ti,but the etchant
> couldn't go all the way to the middle of the wires might be because of
> surface tension. So I had to resort to etching the whole wafer.
>
> Cheers
> A