You can try using SU 8 2000.5 or 2002 and adjust you spin coat parameters in order to get 1 micron thickness. ________________________________ From: Ned FlandersTo: General MEMS discussion Sent: Friday, August 5, 2011 2:14 AM Subject: [mems-talk] Recommend a negative resist ....something that could be patterned to resolutions of 1 um or better. Also, the budget is not unlimited.