1 um resolution does not require 1 um thin resist. Achievable aspect
ratios are more complicated than that.

Look into KMPR 1005 from microchem. It's an easily stripped negative
resist, and spins down to about 4 microns minimum. It's commonly used
for electroplating.

Here's the datasheet (with examples of typical aspect ratios):
http://www.microchem.com/pdf/KMPRDataSheetver4_2a.pdf

- Kevin

On Sat, Aug 6, 2011 at 3:18 AM, Ned Flanders  wrote:
> Thanks, but I need something that I can easily strip. That excludes SU-8.
>
> As for how thick: well, since I need 1 um resolution or better, it
> should be thinner than 1 um.
>
> m