Thanks for the suggestion, I may look into it.

Actually, Microchemcals (a completely different company) has a few
resists that suits us better than the KMPR 1005, but at the moment,
the best candidate seems to be one of the Futurrex resists, as
suggested by Lin.


m

On 8/6/11, Kevin Nichols  wrote:
> 1 um resolution does not require 1 um thin resist. Achievable aspect
> ratios are more complicated than that.
>
> Look into KMPR 1005 from microchem. It's an easily stripped negative
> resist, and spins down to about 4 microns minimum. It's commonly used
> for electroplating.
>
> Here's the datasheet (with examples of typical aspect ratios):
> http://www.microchem.com/pdf/KMPRDataSheetver4_2a.pdf
>
> - Kevin